Reflectance Difference Spectroscopy (RDS)

  A crucial diagnostic for controlling growth at surfaces is the detection of anisotropy in surface structures. One tool we use for this is reflectance difference spectroscopy/normal incidence ellipsometry. Here the surface is probed by a light beam with two orthogonal polarization components. Surface anisotropies usually result in reflectance anisotropies (e.g., grains), which can be both spatially and spectrally resolved. The reflection difference spectroscopy apparatus pictured here has a typical sensitivity of 10-14 or better  

 

RDS: normal incidence ellipsometry

RDS schematic

 

 

 

Isotropic bulk optical anisotropy is surface-induced

D.E. Aspnes et al., JVSTA 6, 1327

 

Example RDS image and results

 

 

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Last Updated: May 5, 2002
Page Created: May 5, 2002
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