Reflection High-Energy Electron Diffraction (RHEED)
and Reflection High-Energy Electron Loss Spectroscopy (RHEELS)

The evolution of structure and morphology during CVD can be followed dynamically with the high-pressure RHEED system. This capability offers a direct window into atomistic processes occurring during CVD. For example, changes in growth-mode (e.g., cluster formation), surface structure, and surface roughness are all reflected in the quality of the RHEED pattern. With the recent addition of a RHEELS analyzer, surface composition can be determined from core-level loss features. In addition, energy filtered RHEED, discriminating against high-energy inelastic scattering, will allow for a quantitative determination of surface roughness.

2xN Reconstruction

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